Browsing by Author "Hasumi, Kazuhisa"

3D measurement of 3D NAND memory hole with CD-SEM and tilted FIB

Contact inspection and resistance - capacitance measurement of Si nanowire with SEM voltage contrast

Contact inspection of Si nanowire with SEM voltage contrast

Cu Pad Height Evaluation Technique Using Four-Directional BSE Signal of SEM for Hybrid Bonding Applications

Cu Pad Surface Height Evaluation Technique by In-line SEM for Wafer Hybrid Bonding

EB metrology of Ge channel gate-all-around FET: buckling evaluation and EB damage assessment

Enabling CD SEM metrology for 5nm technology node and beyond

High-throughput in-line SEM Metrology for Cu Pad Nanotopography for Hybrid Bonding Applications

In-line SEM Evaluation Technique for Cu Pad Nanotopography for Hybrid Bonding Applications

Precise measurement of thin film thickness in 3D-NAND device with CD-SEM

Precise measurement of thin-film thickness in 3D-NAND device with CD-SEM

SEM based overlay measurement between resist and buried patterns

SEM based overlay measurement between via patterns and buried M1 patterns using high voltage SEM

SEM Inspection of Nanowire Devices: Contact inspection, Resistance and Capacitance Measurement and Buckling Evaluation

Variability study with CD-SEM metrology for STT-MRAM: Correlation analysis between physical dimensions and electrical property of the memory element

Variability study with CD-SEM metrology for STT-MRAM: correlation analysis between physical dimensions and electrical property of the memory element