Browsing by Author "Menou, Nicolas"

0.5 nm EOT low leakage ALD SrTiO3 on TiN MIM capacitors for DRAM applications

ALD strontium titanates and their characterization

Alternative high-k dielectrics for semiconductor applications

Alternative high-k dielectrics for semiconductor applications

Atomic layer deposition of hafnium titanates dielectric layers

Atomic layer deposition of strontium titanate films using Sr(tBu3Cp)2 and Ti(OMe)4

Composition influence on the physical and electrical properties of SrxTi1-xOy-based MIM capacitors prepared by Atomic Layer Deposition using TiN bottom electrodes

Comprehensive investigation of trap-assisted conduction in ultra-thin SrTiO3 layers

Crystallization study of thin ZrO2 ALD films on Al203 and on TiN for DRAM MIMCAP applications

Effect of deposition and anneal temperature on batch-ALD deposited ZrO2/Al2O3/ZrO2 films for DRAM MIM capacitor applications

Effect of the composition on the bandgap width of high-k MexTiyOz (Me=Hf,Ta, Sr)

Growth and layer characterization of SrTiO3 by atomic layer deposition using Sr(tBu3Cp)2 and Ti(OMe)4

Growth and material characterization of hafnium titanates deposited by atomic layer deposition

High-k dielectrics and metal gates for future generation memory devices

High-k dielectrics and metal gates for future generation memory devices

High-k dielectrics for future generation memory devices

Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer deposition

Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer deposition

Integrated functional oxides in non-volatile memory devices

Nano beam diffraction: crystal structure and strain analysis at the nano-scale