imec Institutional Repository Browsing {{ collection }} by Author "van den Berg, J.A."

Publication

A comparative X-ray photoelectron spectroscopy and medium-energy ion-scattering study of ultra-thin, Hf-based high-k films

Sygellou, L

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Ladas, S

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Reading, M.A.

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van den Berg, J.A.

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Conard, Thierry

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De Gendt, Stefan

Journal article

2010-03, Surface and Interface Analysis, (2010) 42, p.1057-1060

Publication

Advanced front-end processes for the 45nm CMOS technology node

Collart, E.J.H.

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Felch, S.B.

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Graoui, H.

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Tallavarjula, S.

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Lindsay, Richard

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Pawlak, Bartek

Oral presentation

2004, E-MRS Spring Meeting Symposium B: Materials Science Issues in Advanced CMOS Source-Drain Engineering

Publication

Comparison of electrical measurements with structural analysis of thin high-k hafnium-based films

Hourdakis, E.

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Theodoropoulou, M.

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Nassiopoulou, A.G.

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Parisini, A.

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Reading, M.A.

Proceedings paper

2009, Analytical Techniques for Semiconductor Materials and Process Characterization 6 - ALTECH, 4/10/2009, p.363-372

Publication

Comparison of electrical measurements with structural analysis of thin high-k hafnium-based films

Hourdakis, E.

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Theodoropoulou, M.

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Nassiopoulou, A.G.

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Parisini, A.

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Reading, M.A.

Meeting abstract

2009, 216th ECS Meeting, 4/10/2009, p.1995

Publication

Damage accumulation and dopant migration during shallow As and Sb implantation into Si

Werner, M.

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van den Berg, J.A.

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Armour, D.G.

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Vandervorst, Wilfried

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Collart, E.H.J.

Journal article

2004, Nuclear Instruments & Methods in Physics Research B, 216, p.67-74

Publication

High depth resolution characterization of the damage and annealing behaviour of ultrashallow As-implants in Si

van den Berg, J.A.

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Armour, D.G.

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Werner, M.

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Whelan, S.

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Vandervorst, Wilfried

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Clarysse, Trudo

Proceedings paper

2002, Proceedings 14th International Conference on Ion Implantation Technology Conference, 22/09/2002, p.597-600

Publication

High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS

van den Berg, J.A.

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Reading, M.A.

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Parisini, A.

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Kolbe, M.

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Beckhoff, B.

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Ladas, S.

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Petrik, P.

Meeting abstract

2009, 216th ECS Meeting, 4/10/2009, p.1994

Publication

High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS

van den Berg, J.A.

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Reading, M. A.

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Parisini, A.

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Kolbe, M.

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Beckhoff, B.

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Ladas, S.

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Fried, M.

Proceedings paper

2009, Analytical Techniques for Semiconductor Materials and Process Characterization 6, 4/10/2009, p.349-361

Publication

High resolution, quantitative depth profiling analysis of nm thin hgh-k dielectriclayers using medium energy ion scattering (MEIS)

van den Berg, J.A.

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Reading, M.A.

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Armour, D.G>

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Bailey, P.

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Noakes, T.C.Q.

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Conard, Thierry

Proceedings paper

2009, 19th Ion Beam Analysis Conference - IBA, 7/09/2009

Publication

Nanolayer characterisation by reference-free X-ray fluorescence analysis with synchrotron radiation

Kolbe, M.

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Beckhoff, B.

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Krumrey, M.

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Reading, M.A.

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van den Berg, J.A.

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Conard, Thierry

Meeting abstract

2009, 216th ECS Meeting, 4/10/2009, p.1975

Publication

Physical characterization of the metal/high-k layer interaction upon annealing

Conard, Thierry

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Franquet, Alexis

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Vandervorst, Wilfried

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Reading, M.

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van den Berg, J.A.

Meeting abstract

2008, 214th ECS Meeting, 12/10/2008, p.1965

Publication

Quantitative analysis of thin dielectrica with ultra high resolution ERD, MEIS and RBS

Vandervorst, Wilfried

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Conard, Thierry

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Giangrandi, Simone

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Brijs, Bert

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Bergmaier, A.

Meeting abstract

2007, International Workshop on High-Resolution Depth Profiling, 17/06/2007

Publication

Recent developments in nuclear methods in support of semiconductor characterization

Brijs, Bert

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Bender, Hugo

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Huyghebaert, Cedric

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Janssens, Tom

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Vandervorst, Wilfried

Proceedings paper

2003, Analytical Techniques for Semiconductor Materials and Processes, 27/04/2003, p.50-62

Publication

Sub nanometer depth resolution profiling of the evolution and annealing of damage and the dopant redistribution of ultra-shallow As and Sb implants in Si

van den Berg, J.A.

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Werner, M.

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Armour, D.G.

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Vandervorst, Wilfried

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Clarysse, Trudo

Meeting abstract

2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.446

Publication

TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM

Barozzi, Mario

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Iacob, E

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van den Berg, J.A.

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Reading, M.A.

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Adelmann, Christoph

Meeting abstract

2011, 18th International Conference on Secondary Ion Mass Spectrometry - SIMS XVIII, 18/09/2011

Publication

Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition

Popovici, Mihaela Ioana

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Redolfi, Augusto

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Aoulaiche, Marc

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van den Berg, J.A.

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Douhard, Bastien

Journal article

2015, Microelectronic Engineering, 147, p.108-112

Browsing by Author "van den Berg, J.A."