Browsing Conference contributions by imec author "a127bab792ab3028898bd66f15356bfc06e63b89"
Now showing items 1-20 of 32
-
21 nm Pitch dual-damascene BEOL process integration with full barrierless Ru metallization
Vega Gonzalez, Victor; Wilson, Chris; Paolillo, Sara; Decoster, Stefan; Mao, Ming; Versluijs, Janko; Blanco, Victor; Kesters, Els; Le, Quoc Toan; Lorant, Christophe; Varela Pedreira, Olalla; Lesniewska, Alicja; Heylen, Nancy; El-Mekki, Zaid; van der Veen, Marleen; Webers, Tomas; Vats, Hemant; Rynders, Luc; Cupak, Miroslav; Lee, Jae Uk; Drissi, Youssef; Halipre, Luc; Charley, Anne-Laure; Verdonck, Patrick; Witters, Thomas; Van Gompel, Sander; Kimura, Yosuke; Jourdan, Nicolas; Ciofi, Ivan; Contino, Antonino; Boccardi, Guillaume; Lariviere, Stephane; De Wachter, Bart; Vancoille, Eric; Lazzarino, Frederic; Ercken, Monique; Kim, Ryan Ryoung han; Trivkovic, Darko; Croes, Kristof; Leray, Philippe; Pardons, Katrien; Barla, Kathy; Tokei, Zsolt (2019) -
Accelerated device degradation analysis on high speed Ge waveguide photodetectors
Lesniewska, Alicja; Srinivasan, Ashwyn; Van Campenhout, Joris; O'Sullivan, Barry; Croes, Kristof (2019) -
Buried Power Rail Scaling and Metal Assessment for the 3 nm Node and Beyond
Gupta, Anshul; Varela Pedreira, Olalla; Tao, Zheng; Mertens, Hans; Radisic, Dunja; Jourdan, Nicolas; Devriendt, Katia; Heylen, Nancy; Wang, Shouhua; Chehab, Bilal; Jang, Doyoung; Hellings, Geert; Sebaai, Farid; Lorant, Christophe; Teugels, Lieve; Peter, Antony; Chan, BT; Schleicher, Filip; Demonie, Ingrid; Marien, Philippe; Sepulveda Marquez, Alfonso; Richard, Olivier; Nagesh, Nishanth; Lesniewska, Alicja; Lazzarino, Frederic; Ryckaert, Julien; Morin, Pierre; Altamirano Sanchez, Efrain; Murdoch, Gayle; Boemmels, Juergen; Demuynck, Steven; Na, Myung Hee; Tokei, Zsolt; Biesemans, Serge; Dentoni Litta, Eugenio; Horiguchi, Naoto (2020) -
Cobalt bottom-up contact and via prefill enabling advanced logic and DRAM technologies
van der Veen, Marleen; Vandersmissen, Kevin; Dictus, Dries; Demuynck, Steven; Liu, Ran; Bin, Xiaomin; Nalla, Praveen; Lesniewska, Alicja; Hall, Laurie; Croes, Kristof; Zhao, Larry; Boemmels, Juergen; Kolics, Artur; Tokei, Zsolt (2015) -
Cobalt UBM for fine pitch microbump applications in 3DIC
Derakhshandeh, Jaber; De Preter, Inge; Vandersmissen, Kevin; Dictus, Dries; Di Piazza, Luca; Hou, Lin; Guerrieri, Stefano; Vakanas, George; Armini, Silvia; Daily, Robert; Lesniewska, Alicja; Vandelaer, Yannick; Van De Peer, Myriam; Slabbekoorn, John; Rebibis, Kenneth June; Miller, Andy; Beyer, Gerald; Beyne, Eric (2015) -
CVD-Mn/CVD-Ru-based barrier/liner solution for advanced BEOL Cu/low-k interconnects
Jourdan, Nicolas; van der Veen, Marleen; Vega Gonzalez, Victor; Croes, Kristof; Lesniewska, Alicja; Varela Pedreira, Olalla; Van Elshocht, Sven; Boemmels, Juergen; Tokei, Zsolt (2016) -
Degradation mechanisms in Germanium Electro-Absorption Modulators
Tsiara, Artemisia; Lesniewska, Alicja; Roussel, Philippe; Srinivasan, Ashwyn; Berciano, Mathias; Simicic, Marko; Pantouvaki, Marianna; Van Campenhout, Joris; Croes, Kristof (2022) -
Dielectric Reliability Study of 21 nm Pitch Interconnects with Barrierless Ru Fill
Lesniewska, Alicja; Roussel, Philippe; Tierno, Davide; Vega Gonzalez, Victor; van der Veen, Marleen; Verdonck, Patrick; Jourdan, Nicolas; Wilson, Chris; Tokei, Zsolt; Croes, Kristof (2020) -
Enabling porous low-k dielectric sealing against CVD Mn indiffusion in 22nm half-pitch (dual) damascene interconnects by deposition of sub-1nm thin organic films: from fundamentals to reliability
Armini, Silvia; Lesniewska, Alicja; Jourdan, Nicolas; Delande, Tinne; Vega Gonzalez, Victor; Wilson, Chris; Struyf, Herbert; Tokei, Zsolt (2017) -
First demonstration of Two Metal Level Semi-damascene Interconnects with Fully Self-aligned Vias at 18MP
Murdoch, Gayle; O'Toole, Martin; Marti, Giulio; Pokhrel, Ankit; Tsvetanova, Diana; Decoster, Stefan; Kundu, Souvik; Oniki, Yusuke; Thiam, Arame; Le, Quoc Toan; Varela Pedreira, Olalla; Lesniewska, Alicja; Martinez Alanis, Gerardo Tadeo; Park, Seongho; Tokei, Zsolt (2022-06-15) -
Impact of Mn-based barriers on dielectric breakdown voltage and capacitance
Lesniewska, Alicja; Wu, Chen; Jourdan, Nicolas; Briggs, Basoene; Boemmels, Juergen; Tokei, Zsolt; Croes, Kristof (2016) -
Impact of surface condition on Cobalt drift into LK3.0 films
Tierno, Davide; Lesniewska, Alicja; Kljucar, Luka; van der Veen, Marleen; Tokei, Zsolt; Croes, Kristof (2020) -
Integration of ultralow-k dielectrics using a template replacement approach
Zhang, Liping; de Marneffe, Jean-Francois; Murdoch, Gayle; Vega Gonzalez, Victor; Verdonck, Patrick; Heylen, Nancy; Zha, Lichen; Wu, Chen; Lesniewska, Alicja; Tokei, Zsolt; Boemmels, Juergen; De Gendt, Stefan; Lefferts, Scott (2017) -
Interconnect metals beyond copper: reliability challenges and opportunities
Croes, Kristof; Adelmann, Christoph; Wilson, Chris; Zahedmanesh, Houman; Varela Pedreira, Olalla; Wu, Chen; Lesniewska, Alicja; Oprins, Herman; Beyne, Sofie; Ciofi, Ivan; Kocaay, Deniz; Stucchi, Michele; Tokei, Zsolt (2018) -
Intrinisic reliability of local interconnects for N7 and beyond
Croes, Kristof; Lesniewska, Alicja; Wu, Chen; Ciofi, Ivan; Banczerowska, Aga; Briggs, Basoene; Demuynck, Steven; Tokei, Zsolt; Boemmels, Juergen; Saad, Y.; Gao, Weimin (2015) -
Method to assess the impact of LER and spacing variation on BEOL dielectric reliability using 2D-field simulations for <20nm spacing
Kocaay, Deniz; Roussel, Philippe; Croes, Kristof; Ciofi, Ivan; Lesniewska, Alicja; De Wolf, Ingrid (2018) -
New insights into metal drift induced failure in MOL and BEOL
Wu, Chen; Varela Pedreira, Olalla; Lesniewska, Alicja; Li, Yunlong; Ciofi, Ivan; Tokei, Zsolt; Croes, Kristof (2018) -
Optimized pore stuffing for enhanced compatibility with interconnect integration flow
de Marneffe, Jean-Francois; Zhang, Liping; Rutigliani, Vito; Noya, G.; Cao, Yi; Lesniewska, Alicja; Varela Pedreira, Olalla; Croes, Kristof; Gillot, Christophe; Tokei, Zsolt; Boemmels, Juergen; Baklanov, Mikhaïl (2015) -
Reliability of a DME Ru Semidamascene scheme with 16 nm wide Airgaps
Lesniewska, Alicja; Varela Pedreira, Olalla; Lofrano, Melina; Murdoch, Gayle; van der Veen, Marleen; Dangol, Anish; Horiguchi, Naoto; Tokei, Zsolt; Croes, Kristof (2021) -
Reliability study on cobalt and ruthenium as alternative metals for advance interconnects
Varela Pedreira, Olalla; Croes, Kristof; Lesniewska, Alicja; Wu, Chen; van der Veen, Marleen; De Messemaeker, Joke; Vandersmissen, Kevin; Jourdan, Nicolas; Wen, Liang Gong; Adelmann, Christoph; Briggs, Basoene; Vega Gonzalez, Victor; Boemmels, Juergen; Tokei, Zsolt (2017)