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Demonstration of an InGaAs gate stack with sufficient PBTI reliability by thermal budget optimization, nitridation, high-k material choice, and interface dipole
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Acq. date: 2026-10-08
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497 since deposited on 2021-10-23
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1933 since deposited on 2021-10-23
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Acq. date: 2026-10-08
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