Publication:
Demonstration of an InGaAs gate stack with sufficient PBTI reliability by thermal budget optimization, nitridation, high-k material choice, and interface dipole
Date
Loading...
Journal
Abstract
Description
Statistics
Downloads
255 since deposited on 2021-10-23
47last month
12last week
Acq. date: 2026-04-07
Views
1931 since deposited on 2021-10-23
1last month
Acq. date: 2026-04-07
Citations
Statistics
Downloads
255 since deposited on 2021-10-23
47last month
12last week
Acq. date: 2026-04-07
Views
1931 since deposited on 2021-10-23
1last month
Acq. date: 2026-04-07
Citations